Coventor SEMulator3D 11.3 | Virtual Fabrication & Process Integration Software for Semiconductor & MEMS

Coventor SEMulator3D 11.3 is a powerful virtual fabrication platform that uses 3D process emulation and predictive modeling to analyze and optimize semiconductor, memory, and MEMS manufacturing processes. It enables engineers to predict device performance, identify yield-limiting defects, and perform virtual Design-Technology Co-Optimization (DTCO) before physical silicon is produced.

Core Functionology Overview:

  • 3D Virtual Fabrication & Process Emulation: Creates accurate 3D structural models of devices by emulating the sequential steps of a semiconductor or MEMS fabrication process (deposition, etching, lithography, CMP).

  • Predictive Electrical & Mechanical Analysis: Extracts critical electrical parameters (capacitance, resistance) and mechanical properties (stress, deformation) from the virtual 3D structure to predict device behavior and reliability.

  • Defect & Variation Analysis: Performs Monte Carlo simulations to analyze the impact of process variations and defects on device performance and yield, enabling robust design and process window optimization.