IntelliSuite 9.2: MEMS Design & Simulation Software

IntelliSuite 9.2 is the latest major release of Intellisense Software Corporation’s industry-leading CAD/CAE platform for micro-electromechanical systems (MEMS) design, microfabrication simulation, and multiphysics analysis. Announced in 2022, this version represents a significant evolution in MEMS simulation, with particular emphasis on photonics and optoelectronics-based materials .

Key New Features in IntelliSuite 9.2

Photonics & Optoelectronics Focus

  • Expanded Material Support: Enhanced simulation capabilities for photonics and optoelectronics-based materials, opening new horizons for advanced research and industry applications

  • Optical Device Design: Tailored for MEMS devices incorporating optical and photonic components

The Three Pillars of MEMS Simulation

IntelliSuite 9.2 encompasses the three core pillars of MEMS simulation :

  • Multiphysics: Comprehensive finite element analysis for thermal, electrical, mechanical, and coupled physics

  • Microfabrication: Physics-based process simulation to predict manufacturing outcomes

  • System Integration: Seamless connection with EDA tools via reduced-order modeling

Core Platform Components

Blueprint: Layout Design Tool

  • Purpose-built for MEMS: Specialized layout editor with MEMS-specific features

  • GDSII/DXF Support: Import/export of standard mask formats

  • Design Rule Check: All-angle physical verification for MEMS geometries

  • Cross-Section Viewer: Visualize mask cross-sections and export to PowerPoint

  • Scripting Support: Language-independent scripting for complex designs

  • Boolean Operations: Create complex structures with mask layer manipulations

CleanRoom / FabSim: Process Simulation

  • Physical Simulation: Full physics-based process modeling rather than geometric methods

  • Process Flow Prototyping: Define and debug complex process flows step by step

  • Process Visualization: Animated display of each process step with cross-section views

  • Supported Processes:

    • Deposition (isotropic/anisotropic)

    • Etching (wet/dry, RIE, ICP/Bosch/DRIE)

    • Lithography (including grayscale)

    • Oxidation, diffusion, ion implantation

    • Wafer bonding

    • Electroplating

FabViewer: 3D Process Visualization

  • Voxel-based Graphics: Photo-realistic 3D visualization of complex structures

  • Animation: Display process flow as animated sequence

  • Internal Views: Rotate, pan, zoom, and section cut to view internal features

  • Multi-format Export: PPT, AVI, JPG, RAWIV formats

IntelliEtch: Advanced Etch Simulation

  • Atomic-level Modeling: Precision wet etch simulation for silicon, quartz, sapphire, InP, GaAs

  • High-index Plane Etching: Support for arbitrary crystal orientations

  • DRIE/Bosch Process: Simulation of deep reactive ion etching with scalloping effects

  • Etch Rate Calibration: Tools for Wagon Wheel analysis and CCA calibration

  • GPU Acceleration: Parallel computing for large-scale simulations

IntelliSuite 9.2 download
IntelliSuite 9.2 download